Latest advances in mechanical scanning probe lithography: Techniques, mechanisms, and applications in nanoscale fabrication

Micro and Nanostructures 2026

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Authors: Paolo Pellegrino, Lorenzo Vincenti, Mariafrancesca Cascione, Adriana L. Campa, F. Quaranta, Rosaria Rinaldi, Isabella Farella

DOI: 10.1016/j.micrna.2026.208693

Cited by: 1

References: 113

Fields of Study & Subjects

Force Microscopy Techniques and Applications Nanofabrication and Lithography Techniques Surface and Thin Film Phenomena

References 113