Impedance spectroscopy of field-emission and resistive switching in dielectric films for MEMS capacitive switches applications

Microelectronics Reliability 2026

View at publisher
Authors: J. Theocharis, J.P. Martins, I. Kochilas, A. Mahjoub, E. Eustache, M. Giannouri, A. Ziaei, G. Papaioannou
DOI: 10.1016/j.microrel.2026.116088
Cited by: 1
References: 12

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Advanced Memory and Neural Computing Innovative Energy Harvesting Technologies

Publication details

Journal / source
Microelectronics Reliability
Publisher
Elsevier BV
Volume
180
Pages
116088–116088
Publication date
4 March 2026
Language
EN