Comparison study on effects of film thickness on structure and optical-electrical properties of ITO films deposited in Ar and Ar + H2 atmospheres

Materials Science and Engineering B 2026

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Authors: B.L. Zhu, B.C.W. Sun, F. L. Liu, X.W. Shi, W.Q. Sun
DOI: 10.1016/j.mseb.2026.119351
Cited by: 2
References: 66

Fields of Study & Subjects

ZnO doping and properties Semiconductor materials and interfaces Gas Sensing Nanomaterials and Sensors

Publication details

Journal / source
Materials Science and Engineering B
Publisher
Elsevier BV
Volume
328
Pages
119351–119351
Publication date
11 March 2026
Language
EN