Development of self-powered PVDF based MEMS sensors for sound pressure level measurements
Fields of Study & Subjects
Advanced MEMS and NEMS Technologies
Flow Measurement and Analysis
Seismic Waves and Analysis
Publication details
- Journal / source
- Materials Science in Semiconductor Processing
- Volume
- 206
- Pages
- 110391–110391
- Publication date
- 5 January 2026
- Language
- EN