Development of self-powered PVDF based MEMS sensors for sound pressure level measurements

Materials Science in Semiconductor Processing 2026

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Authors: Mohini Sawane, Mahanth Prasad, S. Murugan, K Velmurugan

DOI: 10.1016/j.mssp.2025.110391

Cited by: 0

References: 18

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Flow Measurement and Analysis Seismic Waves and Analysis

References 18