A review of out-of-plane structural designs and performance enhancement strategies for MEMS Z-axis capacitive accelerometers

Materials Science in Semiconductor Processing 2026

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Authors: Wei Liu, Shu Yang, Chunyan Yin, Guangbin Dou

DOI: 10.1016/j.mssp.2025.110401

Cited by: 0

References: 90

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Piezoelectric Actuators and Control

References 90