Modeling and multi-objective optimization of picosecond laser machining of blind holes in 4H-SiC using response surface methodology

Materials Science in Semiconductor Processing 2026

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Authors: Linfeng Xie, Fei Wang, Zhe Dou, J H Liu, Kuan Luo, Yuyao Li

DOI: 10.1016/j.mssp.2026.110419

Cited by: 1

References: 32

Fields of Study & Subjects

Laser Material Processing Techniques Advanced Surface Polishing Techniques Laser and Thermal Forming Techniques

References 32