Preparation of amino-functionalized silica abrasives for chemical mechanical polishing based on Photoinitiated Polymerization

Materials Science in Semiconductor Processing 2026

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Authors: Qinlong Zhao, Wei Wei, Xin Li, Jingcheng Liu

DOI: 10.1016/j.mssp.2026.110420

Cited by: 0

References: 34

Fields of Study & Subjects

Advanced Surface Polishing Techniques Force Microscopy Techniques and Applications Diamond and Carbon-based Materials Research

References 34