Advanced process for the fabrication of defect-free Ge-rich SiGe on insulator layers

Materials Science in Semiconductor Processing 2026

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Authors: Anne-Flore Mallet, Olivier Gourhant, Adam Arette-Hourquet, Mansour Aouassa, Christophe Duluard, Romain Duru, Luc Favre, Isabelle Berbezier
DOI: 10.1016/j.mssp.2026.110442
Cited by: 3
References: 27

Fields of Study & Subjects

Semiconductor Quantum Structures and Devices Silicon and Solar Cell Technologies Photonic and Optical Devices

Publication details

Journal / source
Materials Science in Semiconductor Processing
Publisher
Elsevier BV
Volume
207
Pages
110442–110442
Publication date
3 February 2026
Language
EN