GaN-based high output voltage binary and ternary digital components achieved by neutral beam etching

Materials Science in Semiconductor Processing 2026

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Authors: Yudong Li, Han Gao, Xuanling Zhou, Xinbo Zou

DOI: 10.1016/j.mssp.2026.110494

Cited by: 0

References: 21

Fields of Study & Subjects

GaN-based semiconductor devices and materials Silicon Carbide Semiconductor Technologies Semiconductor materials and devices

References 21