Revisiting the computation of Vacancy Formation Energy using first-principles density functional theory calculations for VLSI Interconnection reliability

Materials Science in Semiconductor Processing 2026

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Authors: Rajarshi Sarkar, Cher Ming Tan, Debraj Banerjee

DOI: 10.1016/j.mssp.2026.110516

Cited by: 1

References: 55

Fields of Study & Subjects

Copper Interconnects and Reliability Electronic Packaging and Soldering Technologies Silicon and Solar Cell Technologies

References 55