Laser direct writing rapid inversion lithography method based on generative adversarial network

Materials Science in Semiconductor Processing 2026

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Authors: Jiaxin Ji, Liang Chen, Fengming Zhu, Yuxuan Li, Bin Wei

DOI: 10.1016/j.mssp.2026.110525

Cited by: 0

References: 15

Fields of Study & Subjects

Advancements in Photolithography Techniques Industrial Vision Systems and Defect Detection Generative Adversarial Networks and Image Synthesis

References 15