A novel separate-precursor-pulse PECVD SiOx as interfacial oxide for polysilicon passivating contacts applied to industrial high efficiency silicon solar cells

Materials Science in Semiconductor Processing 2026

View at publisher

Authors: Yevgeniya Larionova, Viet Xuan Nguyen, Thomas Pernau, Daniela Seiffert, Rolf Brendel, Thorsten Dullweber

DOI: 10.1016/j.mssp.2026.110563

Cited by: 1

References: 14

Fields of Study & Subjects

Silicon and Solar Cell Technologies Thin-Film Transistor Technologies Silicon Nanostructures and Photoluminescence

References 14