High-resolution characterization of nitrogen doping concentration uniformity in n-type 4H-SiC wafers based on near-ultraviolet photoluminescence

Materials Science in Semiconductor Processing 2026

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Authors: Dapeng Chang, Mengyan Li, Xiufang Chen, Xianglong Yang, Muqing Zhang, Xuejian Xie, Xuanyi Zhao, Hui Chen, Jiaxin Zhang, Xiangang Xu

DOI: 10.1016/j.mssp.2026.110580

Cited by: 2

References: 26

Fields of Study & Subjects

Silicon Carbide Semiconductor Technologies Integrated Circuits and Semiconductor Failure Analysis Silicon and Solar Cell Technologies

References 26