High-fidelity multilayer etching in virtual fabrication via offline reinforcement learning

Materials Science in Semiconductor Processing 2026

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Authors: J. D. Guo, Lin Fu, Mingqiang Geng, Hao Bai, Qingshuang Xu, Dawei Gao, Dianyu Qi, Xiaoming Shi, Dong Ni

DOI: 10.1016/j.mssp.2026.110640

Cited by: 1

References: 19

Fields of Study & Subjects

Nanowire Synthesis and Applications Neural Networks and Reservoir Computing Advancements in Semiconductor Devices and Circuit Design

References 19