Progress in piezoelectric thin films and MEMS devices

Materials Science in Semiconductor Processing 2026

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Authors: Can Sheng, Subramanian Sasikumar, Jiajia Chen, Junhui Ran, Xiaotian Li, Bin Yang
DOI: 10.1016/j.mssp.2026.110675
Cited by: 1
References: 144

Fields of Study & Subjects

Ferroelectric and Piezoelectric Materials Advanced Sensor and Energy Harvesting Materials Innovative Energy Harvesting Technologies

Publication details

Journal / source
Materials Science in Semiconductor Processing
Publisher
Elsevier BV
Volume
210
Pages
110675–110675
Publication date
21 April 2026
Language
EN