Compositionally tunable (AlxGa1-x)2O3 ultra-wide-bandgap multilayers

Materials Science in Semiconductor Processing 2026

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Authors: Yu-Che Ho, Caroline Ormond, Shahriar Mostufa, Matthew Gaddy, Vladimir Kuryatkov, Kai Wu, Stephen B. Bayne, Hieu P. T. Nguyen, Ayrton A. Bernussi
DOI: 10.1016/j.mssp.2026.110706
Cited by: 1
References: 29

Fields of Study & Subjects

Ga2O3 and related materials GaN-based semiconductor devices and materials Silicon Carbide Semiconductor Technologies

Publication details

Journal / source
Materials Science in Semiconductor Processing
Publisher
Elsevier BV
Volume
210
Pages
110706–110706
Publication date
20 April 2026
Language
EN