Fabrication of diamond diaphragms by femtosecond laser etching for pressure sensing

Materials Science in Semiconductor Processing 2026

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Authors: Shunyong Jiang, Dongyang Hou, Xiuming Liu, Xiuming Liu, Jinlian Chen, Ting Lv, Aidi Xiao, Qijun Wang, Fang Dong, Sheng Liu

DOI: 10.1016/j.mssp.2026.110709

Cited by: 1

References: 50

Fields of Study & Subjects

Diamond and Carbon-based Materials Research Laser Material Processing Techniques Advanced Surface Polishing Techniques

References 50