Homogeneous core-shell mesoporous ceria abrasives enabling high-efficiency and low-defect chemical mechanical polishing

Materials Science in Semiconductor Processing 2026

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Authors: Fengjia Yang, Jinhua Liu, Junjie Xue, Fangwei Lu, Hui Shen, Simin Li, 屈新萍, Baimei Tan, Wei Yuan, Fan Zhang

DOI: 10.1016/j.mssp.2026.110765

Cited by: 1

References: 18

Fields of Study & Subjects

Advanced Surface Polishing Techniques Mesoporous Materials and Catalysis Nanoporous metals and alloys

References 18