Study on polishing performance of single crystal SiC assisted by FeSO4 microcapsules

Materials Science in Semiconductor Processing 2026

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Authors: Juze Xie, Zhehan Li, Yinlu Xiong, Huan Ling, HaoZhe Fu, Yangting Ou, Tianxin Luan, Man Hoi Wong, Jisheng Pan

DOI: 10.1016/j.mssp.2026.110802

Cited by: 1

References: 24

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced ceramic materials synthesis Diamond and Carbon-based Materials Research

References 24