Atomistic study on improvement of mechanical properties of aluminum nitride by laser-coupled ultrasonic grinding

Materials Science in Semiconductor Processing 2026

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Authors: He Zhang, Cong Sun, Jun Zhang, Shuwen Lin, Chenhuan Xu, Shihang Gao, Qianxi Zhang

DOI: 10.1016/j.mssp.2026.110824

Cited by: 1

References: 26

Fields of Study & Subjects

Surface Treatment and Residual Stress Metal and Thin Film Mechanics Advanced ceramic materials synthesis

References 26