Plasma activation synergistic with sustained-release fenton polishing for achieving an atomically smooth surface on single-crystal diamond

Materials Science in Semiconductor Processing 2026

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Authors: XJ Huang, Z H Zhang, Kuo Yang, Zhimin Chai, Yuanjing Dai

DOI: 10.1016/j.mssp.2026.110852

Cited by: 1

References: 48

Fields of Study & Subjects

Advanced Surface Polishing Techniques Diamond and Carbon-based Materials Research Tunneling and Rock Mechanics

References 48