Broad-spectrum high-absorption microstructure arrays on <110> monocrystalline silicon processed by femtosecond laser machining based on crystallographic directions assisted with wet etching

Materials Science in Semiconductor Processing 2026

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Authors: Zimeng Yang, Peng Yao, Dongkai Chu, Qingwei Wang, Haizhong Wang, Xuerui Xin, Yuanhao Zhao, Shuoshuo Qu, Chuanzhen Huang

DOI: 10.1016/j.mssp.2026.110888

Cited by: 1

References: 40

Fields of Study & Subjects

Laser Material Processing Techniques Nanowire Synthesis and Applications Silicon Nanostructures and Photoluminescence

References 40