Automated platform for developing wet-etching processes of materials

Materials Science in Semiconductor Processing 2026

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Authors: Daewoong Han, Gahee Kim, Junsuk Kwak, Kyuyoung Hwang, Joonhyung Lee, Youn-Suk Choi, Hyungpil Moon

DOI: 10.1016/j.mssp.2026.110933

Cited by: 1

References: 19

Fields of Study & Subjects

Copper Interconnects and Reliability Machine Learning in Materials Science Block Copolymer Self-Assembly

References 19