Ion track formation and porosity in InSb irradiated with 125 MeV and 150 MeV Ag ions

Ion track formation and porosity in InSb following 125 MeV and 150 MeV 107 Ag swift heavy-ion irradiation are investigated as a function of ion fluence and irradiation angle. Rutherford backscattering spectrometry in channelling geometry reveals track radii of approximately 5 nm and 8 nm for 125 MeV and 150 MeV ion energies, respectively. The results indicate that the damage fraction saturates at approximately 90% amorphization, suggesting partial recrystallization inhibits complete amorphization. In addition to track formation, a porous structure develops at a fluence of 8 . 8 × 1 0 12 ions/cm 2 , whereas no significant porosity is observed at lower fluences. Notably, the average pore diameter and pore density differ for the different irradiation parameters. • RBS/C reveals track radii of ≈ 5 nm and ≈ 8 nm for 125 MeV and 150 MeV, respectively. • Damage fraction saturates at 90% suggesting partial recrystallization. • For 5° and 30° irradiation angles, the average pore diameter is larger at 125 MeV than at 150 MeV. • For 60° irradiation angle, the average pore diameter is larger at 150 MeV than at 125 MeV.