Surface characterizations and lattice strains of GaN thin films induced by 8 MeV 129Xe19+ ion irradiation
Fields of Study & Subjects
GaN-based semiconductor devices and materials
Ion-surface interactions and analysis
X-ray Spectroscopy and Fluorescence Analysis
Publication details
- Journal / source
- Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
- Publisher
- Elsevier BV
- Volume
- 574
- Pages
- 166073–166073
- Publication date
- 4 March 2026
- Language
- EN