Physics-informed VMD and dual-path transformer for high-precision grating critical dimensions measurement via optical scatterometry

Optics Communications 2026

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Authors: Shengquan Nian, Andong Xie, Shijie Liu, Qi Lu, Yunxia Jin, Zhigang Han, Jianda Shao, Rihong Zhu

DOI: 10.1016/j.optcom.2026.133365

Cited by: 1

References: 33

Fields of Study & Subjects

Optical Coatings and Gratings Photonic and Optical Devices Advanced Fiber Optic Sensors

References 33