Optical vortex for enhancing scanning efficiency in coherent Fourier scatterometry systems

Optics and Lasers in Engineering 2026

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Authors: Shujiao Ye, Biwei Wu, Yue Fang, Yubo Fang, Guixin Tang, Weibo Wang

DOI: 10.1016/j.optlaseng.2025.109577

Cited by: 0

References: 32

Fields of Study & Subjects

Orbital Angular Momentum in Optics Optical Coatings and Gratings Plasmonic and Surface Plasmon Research

References 32