Review of system modeling and calibration technologies for specular/diffuse composite surface metrology

Optics and Lasers in Engineering 2026 Open access

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Authors: Yanling Li, Feng Gao, Yongjia Xu, Matthew J. Hill, Yubo Ni, Nan Gao, Zhaozong MENG, Zonghua Zhang, Xiangqian Jiang

DOI: 10.1016/j.optlaseng.2026.109662

Cited by: 3

References: 112

Fields of Study & Subjects

Optical measurement and interference techniques Advanced Measurement and Metrology Techniques Surface Roughness and Optical Measurements

References 112