Subspace joint parameter estimation algorithm based on hilbert transform for constructing analytical signals in high-precision multi-surface phase-shifting interferometry

Optics and Lasers in Engineering 2026

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Authors: Qichao Shen, Fangjun Xie, Shenghuan Jin, Tian’an Zhang, Feng Wang, Yingjie Yu, Lin Chang

DOI: 10.1016/j.optlaseng.2026.109681

Cited by: 1

References: 33

Fields of Study & Subjects

Optical measurement and interference techniques Advanced Measurement and Metrology Techniques Optical Polarization and Ellipsometry

References 33