Precise reconstruction of three-dimensional surface topography of the sidewalls of deep holes for the shape-from-focus microscopy

Optics and Lasers in Engineering 2026

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Authors: Sihan Chen, Jiongtang Xiang, Di Li, Chengzhuo Wang, Zhijie Hua, Xiangchao Zhang

DOI: 10.1016/j.optlaseng.2026.109875

Cited by: 1

References: 23

Fields of Study & Subjects

Image Processing Techniques and Applications Optical measurement and interference techniques Advanced X-ray Imaging Techniques

References 23