Research on surface quality and subsurface damage of sapphire microgroove etched by femtosecond laser-induced plasma-assisted ablation

Optics & Laser Technology 2026

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Authors: Pai Hu, Xizhao Lu, Bujin Li, Ningchang Wang, Binggong Yan, Gaofeng Zheng, Anna Jiang, Anna Jiang, Dazhong Wang, Rao Yao, Feng Jiang

DOI: 10.1016/j.optlastec.2026.114728

Cited by: 2

References: 35

Fields of Study & Subjects

Laser Material Processing Techniques Laser-induced spectroscopy and plasma Advanced Surface Polishing Techniques

References 35