An efficient full-field swept-source interferometric system with large axial range for surface topography and height measurement

Optics & Laser Technology 2026

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Authors: Hongyu Shen, Kecheng Yang, Wenping Guo, Zhefeng Chen, Zhiheng Shao, Wei Xiang, Wei Li, Min Xia

DOI: 10.1016/j.optlastec.2026.114745

Cited by: 0

References: 29

Fields of Study & Subjects

Optical measurement and interference techniques Surface Roughness and Optical Measurements Advanced Measurement and Metrology Techniques

References 29