Iteration-free framework of least squares image matching for LSM mover positioning
Fields of Study & Subjects
Advanced Measurement and Metrology Techniques
Optical measurement and interference techniques
Image Processing Techniques and Applications
Publication details
- Journal / source
- Optics & Laser Technology
- Volume
- 198
- Pages
- 114862–114862
- Publication date
- 10 February 2026
- Language
- EN