Study on picosecond laser multi-layer modification and stealth dicing of 4H-SiC wafers based on laser power modulation

Optics & Laser Technology 2026

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Authors: Yixiong Yan, Sijia Chen, Yuxuan Cheng, Cong Mao, Mingjun Zhang, Yujie Zheng, Weidong Tang, Ji’an Duan

DOI: 10.1016/j.optlastec.2026.114882

Cited by: 2

References: 24

Fields of Study & Subjects

Laser Material Processing Techniques Advanced Surface Polishing Techniques Silicon and Solar Cell Technologies

References 24