Geometric error correction in micro-probe fiber interferometry based on mode field matching for nanometer positioning

Optics & Laser Technology 2026 Open access

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Authors: Dongguang Li, Chen Luo, Jiahui Guo, Tong Qu, Yilin Yang, Xiaojun Liu

DOI: 10.1016/j.optlastec.2026.115011

Cited by: 0

References: 35

Fields of Study & Subjects

Advanced Measurement and Metrology Techniques Optical measurement and interference techniques Piezoelectric Actuators and Control

References 35