Surface texturing and localized oxidation of Tantalum nano-film by fs-laser

Optics & Laser Technology 2026

View at publisher
Authors: Lina Grinevičiūtė, Hsin‐Hui Huang, Haoran Mu, Julianija Nikitina, Nguyen Hoai An Le, Tomas A. Katkus, Andrew Siao Ming Ang, Saulius Juodkazis
DOI: 10.1016/j.optlastec.2026.115018
Cited by: 1
References: 37

Fields of Study & Subjects

Laser Material Processing Techniques Laser-Ablation Synthesis of Nanoparticles Copper Interconnects and Reliability

Publication details

Journal / source
Optics & Laser Technology
Publisher
Elsevier BV
Volume
199
Pages
115018–115018
Publication date
27 February 2026
Language
EN