Low-damage micromachining of sapphire wafers via plasma-mediated femtosecond laser ablation enabled by suspended nanocopper film functionalization

Optics & Laser Technology 2026

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Authors: Shaoqi Deng, Wen jun Zhang, Jing Han, Xiao Sun, Lianqing Zhu

DOI: 10.1016/j.optlastec.2026.115021

Cited by: 2

References: 26

Fields of Study & Subjects

Laser Material Processing Techniques Laser-induced spectroscopy and plasma Laser-Ablation Synthesis of Nanoparticles

References 26