Burst-mode fs-laser direct writing for full-thickness oxidation of Ta thin films

Optics & Laser Technology 2026 Open access

Read full text

Authors: Lina Grinevičiūtė, Hsin-Hui Huang, Haoran Mu, Nguyen Hoai An Le, Andrew Siao Ming Ang, Dan Kapsaskis, Tomas A. Katkus, Saulius Juodkazis

DOI: 10.1016/j.optlastec.2026.116424

Cited by: 0

Fields of Study & Subjects

Laser Material Processing Techniques Laser-Matter Interactions and Applications Nonlinear Optical Materials Studies