Investigation on structure evolution of ion-implanted GaN epi-layers

Physica B Condensed Matter 2026

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Authors: Rui Huang, Chenglong Jiang, Lei Liang, Yue Liang, Zhiyong Wang

DOI: 10.1016/j.physb.2026.418365

Cited by: 0

References: 38

Fields of Study & Subjects

GaN-based semiconductor devices and materials Ion-surface interactions and analysis Diamond and Carbon-based Materials Research

References 38