Thermally assisted interface engineering of optical and dielectric properties of amorphous SiC thin films

Physica B Condensed Matter 2026

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Authors: Akshay Kumar, Milap Singh, Akhilesh Pandey, Shankar Dutta, Ambesh Dixit

DOI: 10.1016/j.physb.2026.418849

Cited by: 1

References: 57

Fields of Study & Subjects

Silicon Carbide Semiconductor Technologies Thin-Film Transistor Technologies Copper Interconnects and Reliability

References 57