Response of surface micro-topography of monocrystalline silicon to physical characteristics of polishing pads

Precision Engineering 2026

View at publisher
Authors: Yujie Liu, Lingzhong Li, Fukun Li, Guanbo Qiao, Haixiang Hu, Yang Bai, X. W. Zhang
DOI: 10.1016/j.precisioneng.2026.01.012
Cited by: 3
References: 29

Fields of Study & Subjects

Advanced Surface Polishing Techniques Force Microscopy Techniques and Applications Advanced optical system design

Publication details

Journal / source
Precision Engineering
Publisher
Elsevier BV
Volume
99
Pages
221–234
Publication date
9 January 2026
Language
EN