Advances in vibration-assisted ultra-precision machining of micro/nano structures

Precision Engineering 2026

View at publisher

Authors: Rongfei Zou, Guoqing Zhang, Zejiang Xu, Minghua Pan, Wenheng Huang, Mingguo Peng

DOI: 10.1016/j.precisioneng.2026.03.018

Cited by: 3

References: 191

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced machining processes and optimization Nanofabrication and Lithography Techniques

References 191