Modeling and analysis of elastic mechanics-based tool influence function for robotic polishing of single-crystal silicon

Precision Engineering 2026

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Authors: Yikai Zang, Zhongdi She, Changlin Liu, Jinyang Ke, Jianning Chu, Junfeng Xiao (3833005), Jianguo Zhang, Xiao Chen, Jianfeng Xu

DOI: 10.1016/j.precisioneng.2026.06.010

Cited by: 1

References: 42

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced machining processes and optimization Modular Robots and Swarm Intelligence

References 42