Direction-constrained phase reconstruction for nanoscale displacement measurement with a weak-feedback self-mixing grating interferometer

Precision Engineering 2026

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Authors: Song Song, Zhikun Chang, Dongqing Chen, Wei Zhu, Deng Xiao

DOI: 10.1016/j.precisioneng.2026.08.014

Cited by: 1

References: 38

Fields of Study & Subjects

Advanced Measurement and Metrology Techniques Optical Coatings and Gratings Force Microscopy Techniques and Applications

References 38