Investigation of tool wear characteristic of nano-polycrystalline diamond in ultraprecision cutting of silicon

Procedia CIRP 2026 Open access

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Authors: Asuka Otani, Jiwang Yan
DOI: 10.1016/j.procir.2026.02.027
Cited by: 1
References: 10

Fields of Study & Subjects

Advanced Surface Polishing Techniques Diamond and Carbon-based Materials Research Advanced machining processes and optimization

Publication details

Journal / source
Procedia CIRP
Publisher
Elsevier BV
Volume
144
Pages
561–566
Publication date
1 January 2026
Language
EN