Monitoring of cleanroom environmental quality as a function of air exchange
Abstract
This paper focuses on the monitoring of cleanroom environmental quality as a function of air exchange rates. Addressing this topic is crucial for several reasons that impact various industries and have a direct effect on the environment. The most important reasons include product quality, health and safety, energy efficiency, structural integrity, and also compliance with standards and regulations. The aim of this paper is to analyze the influence of various air exchange rates on airborne particle concentration and temperature-humidity parameters, while considering the preservation of structural stability and functionality of cleanrooms. The research employs a combination of monitoring methods, including continuous measurement of particle concentration using optical particle counters and measurement of temperature and humidity using digital sensors. The results will provide quantitative data on the correlation between air exchange and environmental quality in cleanrooms, enabling the optimization of operational parameters and ensuring the required cleanliness class. It also focuses on identifying potential risks to structural integrity that may lead to damage to cleanroom components.
Fields of Study & Subjects
Mechanical and Thermal Properties Analysis
Hygrothermal properties of building materials
Wireless Sensor Networks for Data Analysis
Publication details
- Journal / source
- Procedia Structural Integrity
- Publisher
- Elsevier BV
- Volume
- 77
- Pages
- 177–182
- Publication date
- 1 January 2026
- Language
- EN