Theoretical analysis and design improvement of nonlinearity in capacitive accelerometers

Sensors and Actuators A Physical 2026

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Authors: Jiacheng Li, Rui Feng, Ming Zhou, Xinlian Shang, Xiaoyi Wang, Huikai Xie
DOI: 10.1016/j.sna.2026.117480
Cited by: 1
References: 16

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Soft Robotics and Applications Piezoelectric Actuators and Control

Publication details

Journal / source
Sensors and Actuators A Physical
Publisher
Elsevier BV
Volume
400
Pages
117480–117480
Publication date
16 January 2026
Language
EN