All-silica optical fiber Fabry-Perot vibration sensor based on MEMS and laser welding for high temperature up to 800 ℃
Fields of Study & Subjects
Advanced Fiber Optic Sensors
Advanced MEMS and NEMS Technologies
Advanced Sensor and Control Systems
Publication details
- Journal / source
- Sensors and Actuators A Physical
- Publisher
- Elsevier BV
- Volume
- 399
- Pages
- 117497–117497
- Publication date
- 13 January 2026
- Language
- EN