A pinwheel-shaped MEMS microspeaker with enhanced SPL and low harmonic distortion

Sensors and Actuators A Physical 2026

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Authors: Rui Liu, Zeyi Wang, Yuanpeng Ma, Dong Zhang, X J Guo

DOI: 10.1016/j.sna.2026.117505

Cited by: 1

References: 28

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Acoustic Wave Phenomena Research Mechanical and Optical Resonators

References 28