Spatially resolved real-time monitoring of plasma processing chamber using quartz crystal microbalance

Sensors and Actuators A Physical 2026

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Authors: Ji Eun Kang, Ho Gon Kim, Sun Jae Jeong, Hye Won Han, Si Yeon Kim, Ga Hee Oh, Da Hun Ko, Dong Hee Kim, Geun Young Yeom

DOI: 10.1016/j.sna.2026.117508

Cited by: 1

References: 34

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Plasma Diagnostics and Applications Copper Interconnects and Reliability

References 34